Jacob Bertrand: SVC2022; An Economical ALD Development Reactor for Every Lab

65th Annual Technical Conference Proceedings: May 2 – 5, 2022 © 2022 Society of Vacuum Coaters all rights reserved, ISSN 0737-5921, ISBN 978-1-878068-42-2 The following was presented at the 2022 SVC TechCon: An Economical ALD Development Reactor for Every Lab by: Jacob A. Bertrand, Frank Papa, and Marion McEuen Maxima Sciences LLC, Montgomery, OH GP Plasma, Medina, OH Abstract: Maxima Sciences LLC and GP Plasma would like to introduce the RALD (Research Atomic Layer Deposition) starter system. It is designed to ease entry into Atomic Layer Deposition (ALD) research. Historically, getting started in ALD research has required buying an expensive system or building one, neither of which is suitable for most labs when getting started. Our reactor system is designed with the researcher in mind. It is sized to allow deposition on 200 mm wafers as well as 3D substrates. It is a reliable benchtop system which fits in a minimum footprint and does not require numerous or specialized utility support, allowing it to be dropped simply into an existing lab. The system’s user-friendly design allows the end user to easily manage maintenance. By being capable of accepting standard pre-packaged, or refillable, precursor cylinders, the choices in chemistry are endless. Our goal is to provide a system that allows researchers to focus on their application and not maintaining their tool. If you’re looking for a no-frills workhorse to jumpstart your ALD research, contact us."

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